Research Article
Transparent UWB Antenna with IZTO/Ag/IZTO Multilayer Electrode Film
Table 2
Process conditions.
| | | IZTO | Ag |
| | Power supply | RF magnetron | DC magnetron | | Power | 100 W | 10 W | | Initial vacuum | 5 × 10−7 Torr | 5 × 10−7 Torr | | Process vacuum | 3.5 mTorr | 5 mTorr | | Oxygen partial pressure | 3% | — | | Thickness | 45 nm | 10 nm |
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