Research Article

Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas

Table 1

Commercially available polymers for printed electronics.

NameSpecificationsProperties/current limits

Riston® (DuPont)Dry filmA “general purpose” dry film for acid and alkaline etch up to 15 μm
Kapton (DuPont)Dry filmA “general purpose” dry film for printing with all types of nanoparticle ink (Ag, Au, and CNT)
NovaCentrix Novela® (NOVELA Advance Microsystem)One-sided dry filmSubstrate thickness: 10–25 μm
Minimum track width and spacing: 10 μm
Minimum dielectric layer thickness: 1.8 μm