Research Article

Effect of C/Si Ratio on the Electrochemical Behavior of a-SiCx:H Coatings on SS301 Substrate Deposited by PECVD

Figure 3

Three-dimensional AFM images of (a) a-SiC0.59:H, (b) a-SiC0.75:H, (c) a-SiC0.89:H, and (d) a-SiC1.02:H coatings on SS301 substrate.
565109.fig.003a
(a)
565109.fig.003b
(b)
565109.fig.003c
(c)
565109.fig.003d
(d)