International Journal of Chemical Engineering / 2012 / Article / Fig 13

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Figure 13

EPMA photographs of the NaHCO3 adsorbents before and after experiments.
329419.fig.0013a
(a) Component
329419.fig.0013b
(b) F content
329419.fig.0013c
(c) Si content