International Journal of Chemical Engineering / 2012 / Article / Fig 2

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Figure 2

Schematic of the dry-type gas treatment system.
329419.fig.002a
(a) Reaction property of CaCo3
329419.fig.002b
(b) Reaction property of NaHCO3