Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Table 2

Experimental conditions of the gas-solid reaction of HF and CaCO₃.

	Flow rate of the treated gases						Pyrolysis gas conditions		Fixation conditions
Test no.	C2H2F4	Ar	H2O	Air	N2	Total	HF flow rate	HF concentration	Adsorbent			Reaction temperature	Space velocity	SV	L/D
	[mL/min]	[mL/min]	[mL/min]	[mL/min]	[mL/min]	[mL/min]	[mL/min]	[mol/m^3]	Type	Weight	Grain size	[^°C]	[cm/s]	[h^−1]
										[g]	[mm]
1	5	300	50	100	1100	1555	20	0.574	CaCO3	31	1~2	150	6.1	4408.4	1.2
2	20	300	75	150	1000	1595	80	2.239	CaCO3	31	1~2	150	6.2	4295.5	1.2
3	40	300	150	300	700	1590	160	4.492	CaCO3	31	1~2	150	6.2	4394.3	1.2
4	5	300	50	100	1100	1555	20	0.574	CaCO3	31	2~5	150	6.1	4408.4	1.2
5	20	300	75	150	1000	1595	80	2.239	CaCO3	31	2~5	150	6.2	4295.5	1.2
6	40	300	150	300	700	1590	160	4.492	CaCO3	31	2~5	150	6.2	4394.3	1.2