International Journal of Chemical Engineering / 2012 / Article / Tab 2

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Table 2

Experimental conditions of the gas-solid reaction of HF and CaCO3.

Flow rate of the treated gasesPyrolysis gas conditionsFixation conditions
Test no.C2H2F4ArH2OAirN2TotalHF flow rateHF concentrationAdsorbentReaction temperatureSpace velocitySVL/D
[mL/min][mL/min][mL/min][mL/min][mL/min][mL/min][mL/min][mol/m3]TypeWeightGrain size[°C][cm/s][h−1]
[g][mm]

153005010011001555200.574CaCO3311~21506.14408.41.2
2203007515010001595802.239CaCO3311~21506.24295.51.2
34030015030070015901604.492CaCO3311~21506.24394.31.2
453005010011001555200.574CaCO3312~51506.14408.41.2
5203007515010001595802.239CaCO3312~51506.24295.51.2
64030015030070015901604.492CaCO3312~51506.24394.31.2