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International Journal of Chemical Engineering

International Journal of Chemical Engineering / 2012 / Article / Tab 3

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Table 3

Rate constants of the gas-solid reaction of HF and CaCO3.
Grain size 1-2 mm = 6.67 × 10−3 [m3/(mol·min)] = 1.88 × 10−2 [m3/(mol·min)]
Grain size 2–5 mm = 5.37 × 10−3 [m3/(mol·min)] = 1.17 × 10−2 [m3/(mol·min)]