Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Table 4

Experimental conditions of the fixed-bed furnace.

	W	T	V	L	L/D	v	SV
	g	^°C	cm^3	cm	—	cm/s	h^−1
NaHCO3 or NaF	12	150	10.4	1.68	0.60	11.7	25066