Fabricating Pinhole-Free YSZ Sub-Microthin Films by Magnetron Sputtering for Micro-SOFCs

Figure 2

SEM images of different thin films deposited on dense polycrystalline alumina plate (a series) and on silicon wafer (b series). (a1, b1) as-sputtered, (a2, b2) annealed at 800°C, and (a3, b3) annealed at 1200°C.