Fabricating Pinhole-Free YSZ Sub-Microthin Films by Magnetron Sputtering for Micro-SOFCs
Figure 5
(a). In situ conductivities in logarithmic scale changes with thermal oxidation temperature. (b) Logarithmic conductivities versus reciprocal temperatures from YSZ thin films achieved at different oxidation temperatures, that are 800°C and 1200°C, in comparison with 8YSZ commercial plate.
