Online Monitoring of Copper Damascene Electroplating Bath by Voltammetry: Selection of Variables for Multiblock and Hierarchical Chemometric Analysis of Voltammetric Data

Figure 1

Multicyclic staircase voltammograms ( = 10 mV, = 1 ms) of the training set corresponding to various concentrations of suppressor: 5.00 (dark blue, soln. C1 in Table 1), 6.00 (magenta, C8), 7.00 (red, C15), 8.00 (light blue, C19), and 9.00 (green, C21) mL L⁻¹. Magnified portion corresponding to the ninth cycle.