Online Monitoring of Copper Damascene Electroplating Bath by Voltammetry: Selection of Variables for Multiblock and Hierarchical Chemometric Analysis of Voltammetric Data

Table 6

, PRESS, MNSRTEP, and MNSREP calculated for external validation set for various calibration models for different number of factors. Selected optimum parameters are bolded.

Decomposition and regression Technique	# of factors, F (latent variables)		PRESS	MNSRTEP	MNSREP
CPCR	1	0.9948	0.5475	1.6381	1.7168
CPCR	2	0.9971	0.1972	1.0765	1.0820
CPCR	3	0.9971	0.1859	1.0152	1.0019
HPCR	1	0.9948	0.5470	1.6375	1.7161
HPCR	2	0.9972	0.1969	1.0761	1.0779
HPCR	3	0.9972	0.1892	1.0393	1.0302
HPLS	1	0.9954	0.5056	1.6003	1.6746
HPLS	2	0.9978	0.1855	1.0824	1.1048
HPLS	3	0.9967	0.3397	1.4312	1.5598
MBPLS	1	0.9949	0.5423	1.6323	1.7103
MBPLS	2	0.9969	0.2039	1.0997	1.1111
MBPLS	3	0.9890	0.6846	1.8698	2.0860