Table 1: Comparison of the accuracy in the trench surface prediction, corresponding to different cases of the cost functions and different levels of applied noise.

Trenches 1%2%5%10%15%20%30%40%

1 trench 3.74 × 10−23.92 × 10−23.65 × 10−24.08 × 10−25.46 × 10−27.62 × 10−20.1183290.142537
3 trenches 3.75 × 10−23.95 × 10−23.61 × 10−24.14 × 10−26.02 × 10−27.73 × 10−20.1156350.138153
10 trenches 3.75 × 10−23.97 × 10−23.61 × 10−24.22 × 10−25.67 × 10−27.45 × 10−20.1087590.100952
Superposition of 10 3.75 × 10−23.97 × 10−23.54 × 10−24.10 × 10−25.67 × 10−27.45 × 10−20.1087240.115774