101823.fig.005a
(a)
101823.fig.005b
(b)
101823.fig.005c
(c)
101823.fig.005d
(d)
101823.fig.005e
(e)
101823.fig.005f
(f)
Figure 5: Fabrication process of DOEs; (a) silicon substrate cleaning, (b) PR coating, (c) E-beam lithography, (d) developing, (e) FAB etching, and (f) hot-embossing molding.