Modeling of Tool Wear in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Table 1

Experimental conditions for VANILA process.

Machine	AFM dimension 3100
Abrasive	10 nm sized diamond nanoparticles
Tool	Silicon with ~8 nm tip radius
Liquid medium	Deionized water
Slurry concentration	0.5 vol. conc %
Temperature	300 K