A New Process for On-Chip Inductors with High Q-Factor Performance

Figure 4

Top view of an inductor marking the supporting pillar positions in dark squares which are placed below the device. The spiral windings are realized in top metal (metal-3) and the underpasses in the second metallization layer (metal-2). The line on the left side marks the cut position for the cross-section view in Figure 3. The arrows show the view direction.