Fully Distributed Tunable Bandpass Filter Based on Ba_𝟎.𝟓Sr_𝟎.𝟓TiO_𝟑 Thin-Film Slow-Wave Structure

Table 1

BST-0.5 thin film dielectric properties extracted from IDC and CPW scattering parameters measured between 1 and 13 GHz. The reported BST dielectric tunability is measured at 3 GHz and 30 V applied bias.

Gap width	𝜀𝑟 (at 3 GHz)	tan𝛿 (at 3 GHz)	BST Tunability (at 3 GHz and 30 V)
10 μm	980 ± 50	0.04 ± 0.005	26%
3 μm	1050 ± 50	0.04 ± 0.005	60%