Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam

Table 9

Comparison of Device Parameters.

Beam Type	(N/m)	(Volts)	(N)	% Reduction
				= 150 m, = 2 m Beam, Electrostatic area = 2500 m^2
Uniform Polysilicon	334.5	189.26	220.77	—	—	—
Uniform Composite	183.85	149.96	121.34	45	20.7	45
Polysilicon; Varying Section	226	155.57	149.16	32.4	17.8	32.4
Composite Varying Section	125.39	115.88	82.75	62.5	38.7	62.5
= 300 m, = 2 m Beam, Electrostatic area = 5000 m^2
Uniform Polysilicon	41.81	47.31	27.59	—	—	—
Uniform Composite	23.5	35.5	15.51	43.7	24.9	43.7
Polysilicon; Varying Section	33.46	42.32	22.08	20.2	10.5	20
Composite Varying Section	18.76	31.69	12.38	55.1	33	55.1