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International Journal of Optics
Volume 2011, Article ID 902158, 9 pages
http://dx.doi.org/10.1155/2011/902158
Research Article

Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

Instrumentation Division, Brookhaven National Laboratory, Upton, NY 11973, USA

Received 12 October 2010; Accepted 28 March 2011

Academic Editor: Wolfgang Osten

Copyright © 2011 Shinan Qian. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of 1 μrad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.