Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

<table>Method of measuring systematic slope error caused by the BLM for the LTP MF: an external pencil beam is scanned laterally over the LTP MF aperture by a pentaprism. If there is no systematic slope error, the slope curve should be a straight line.</table>

International Journal of Optics

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Figure 7

Figure 7: Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 

Figure 7 | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 