Polishing Sapphire Substrates by 355 nm Ultraviolet Laser
Figure 4
Effect of laser pulse repetition rate on sapphire polishing (laser energy of 0.036 mJ, scanning speed of 90 mm/s, single-scan polishing, Sample A, incident angle of 50° in (b), (c)).
(a) Effect of laser pulse repetition rate on surface roughness
