Polishing Sapphire Substrates by 355 nm Ultraviolet Laser

Table 1

The laser parameters.

Laser energy (mJ)	0.03, 0.036, 0.044, 0.050, 0.056, 0.06, 0.064
Laser pulse repetition rate (kHz)	10, 20, 30, 40, 50, 60
Laser scanning speed (mm/s)	10, 30, 50, 70, 90, 110, 130
Incident angle (^°)	0, 10, 30, 50
Scanning patterns	A, B, C, D, E