Towards Chip-Based Salinity Measurements for Small Submersibles and Biologgers

Table 2

Design parameter of pressure sensors (cf. Figure 2).

Design	𝑡 (μm)	𝑟 (μm)	𝑔 (μm)	rc (μm)	Maximum pressure (dbar)
P1	70	1000	40	475	390
P2	70	1000	40	575	650
P3	70	1000	40	625	910
P4	70	1000	40	675	1330