Progress in Polycrystalline Thin-Film Cu(In,Ga)Se₂ Solar Cells

Table 2

Alternative buffer layers and their deposition methods.

Buffer Layer	Deposition Method	References
ZnS	CBD	[250–253]
ZnS	MBE	[254]
ZnS(O,OH)	CBD	[25]
ZnSe	MOCVD	[255, 256]
ZnSe	ALCVD	[257]
ZnSe	ALD	[258]
ZnSe	CBD	[259]
ZnIn2Se4	PVD	[260]
ZnInXSeY	Coevaporation	[261]
ZnX-Y MgXO	Co-sputtered	[262]
ZnX-Y MgXO	ALD	[263]
In2S3	ALD	[264, 265]
In2S3	ALCVD	[266]
In2S3	MOCVD	[267]
In2S3	PVD	[268, 269]
In2S3	US	[270]
In2Sx	Coevaporation	[271]
InxSy	Sputtered	[272]
InxSy	Coevaporation	[273, 274]
Inx(OH,S)y	CBD	[275]
Zn(Se,OH)	CBD	[276]
Zn(S,O,OH)	CBD	[256, 277]
Zn(S,O)	CBD	[278]
	ALD	[279]
ZnS/Zn(S,O)	CBD	[280]
ZnMgO	CBD	[263]
	ALD	[278]

CDB-Chemical Bath Deposition, MBE-Molecular Beam Epitaxy, MOCVD-metalorganic chemical vapour deposition, ALCVD-Atomic Layer CVD, ALD-Atomic Layer Deposition, PVD-Physical Vapour Deposition, US-Ultrasonic spray.