Amorphous Silicon Single-Junction Thin-Film Solar Cell Exceeding 10% Efficiency by Design Optimization

Table 4

ZnO films deposition parameters.

Layer	Flow rate (mmol/min)			Pressure	Heater temp. (°C)	Time (hour)	Thickness (nm)
	H2O	DEZ	B2H6
ZnO:B	200	70	0.54	3 Torr	158	4.0	70

DEZ: diethylzinc.