Nanostructural, Chemical, and Mechanical Features of nc-Si:H Films Prepared by PECVD

Figure 3

Raman spectra of the films. The best fits are superimposed in each spectrum. The films were deposited for (a) 10, (b) 180, and (c) 360 min. (d) Crystal size and volume fraction versus film thickness.

(a)

(b)

(c)

(d)