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International Journal of Photoenergy
Volume 2012, Article ID 723714, 7 pages
http://dx.doi.org/10.1155/2012/723714
Research Article

In Situ and Ex Situ Studies of Molybdenum Thin Films Deposited by rf and dc Magnetron Sputtering as a Back Contact for CIGS Solar Cells

1Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, VA 23529, USA
2Wright Center for Photovoltaic Innovation and Commercialization, University of Toledo, Toledo, OH 43606, USA

Received 16 December 2011; Accepted 31 January 2012

Academic Editor: Bhushan Sopori

Copyright © 2012 K. Aryal et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. P. Jackson, D. Hariskos, E. Lotter et al., “New world record efficiency for Cu(In,Ga)Se2 thin-film solar cells beyond 20%,” Progress in Photovoltaics: Research and Applications, vol. 19, no. 7, pp. 894–897, 2011. View at Publisher · View at Google Scholar
  2. K. Orgassa, H. W. Schock, and J. H. Werner, “Alternative back contact materials for thin film Cu(In,Ga)Se2 solar cells,” Thin Solid Films, vol. 431-432, pp. 387–391, 2003. View at Publisher · View at Google Scholar · View at Scopus
  3. J. H. Scofield, A. Duda, D. Albin, B. L. Ballard, and P. K. Predecki, “Sputtered molybdenum bilayer back contact for copper indium diselenide-based polycrystalline thin-film solar cells,” Thin Solid Films, vol. 260, no. 1, pp. 26–31, 1995. View at Google Scholar · View at Scopus
  4. A. A. Kadam, A. H. Jahagirdar, and N. G. Dhere, “Effect of stresses in molybdenum back contact film on properties of CIGSS absorber layer,” in Proceedings of the Materials Research Society Spring Meeting, pp. 423–429, April 2005. View at Scopus
  5. H. A. Al-Thani, F. S. Hasoon, M. Young et al., “The effect of Mo back contact on Na out-diffusion and device performance of Mo/Cu(In,Ga)Se2/CdS/ZnO solar cells,” in Proceedings of the 29th IEEE Photovoltaic Specialists Conference, pp. 720–723, New Orleans, La, USA, May 2002. View at Scopus
  6. G. Gordillo, M. Grizález, and L. C. Hernandez, “Structural and electrical properties of DC sputtered molybdenum films,” Solar Energy Materials and Solar Cells, vol. 51, no. 3-4, pp. 327–337, 1998. View at Google Scholar · View at Scopus
  7. M. C. K. Tinone, T. Haga, and H. Kinoshita, “Multilayer sputter deposition stress control,” Journal of Electron Spectroscopy and Related Phenomena, vol. 80, pp. 461–464, 1996. View at Publisher · View at Google Scholar · View at Scopus
  8. L. Assmann, J. C. Bernède, A. Drici, C. Amory, E. Halgand, and M. Morsli, “Study of the Mo thin films and Mo/CIGS interface properties,” Applied Surface Science, vol. 246, no. 1–3, pp. 159–166, 2005. View at Publisher · View at Google Scholar · View at Scopus
  9. N. Miyata and S. Akiyoshi, “Preparation and electrochromic properties of rf-sputtered molybdenum oxide films,” Journal of Applied Physics, vol. 58, no. 4, pp. 1651–1655, 1985. View at Publisher · View at Google Scholar · View at Scopus
  10. M. A. Martínez and C. Guillén, “Effect of r.f.-sputtered Mo substrate on the microstructure of electrodeposited CuInSe2 thin films,” Surface and Coatings Technology, vol. 110, no. 1-2, pp. 62–67, 1998. View at Google Scholar
  11. C. Dicov, M. Marinov, H. Maciel, K. Grigorov, I. Nedkov, and G. Beshkov, “Properties of Cr and Mo thin films deposited by RF sputtering,” Journal of Optoelectronics and Advanced Materials, vol. 7, no. 1, pp. 385–387, 2005. View at Google Scholar · View at Scopus
  12. T. Wada, “Microstructural characterization of high-efficiency Cu(In,Ga)Se2 solar cells,” Solar Energy Materials and Solar Cells, vol. 49, no. 1–4, pp. 249–260, 1997. View at Google Scholar · View at Scopus
  13. J. Nagano, “Electrical resistivity of sputtered molybdenum films,” Thin Solid Films, vol. 67, no. 1, pp. 1–8, 1980. View at Google Scholar · View at Scopus
  14. H. Khatri and S. Marsillac, “The effect of deposition parameters on radiofrequency sputtered molybdenum thin films,” Journal of Physics Condensed Matter, vol. 20, no. 5, Article ID 055206, 2008. View at Publisher · View at Google Scholar · View at Scopus
  15. S. Marsillac, N. Barreau, H. Khatri et al., “Spectroscopic ellipsometry studies of In2S3 top window and Mo back contacts in chalcopyrite photovoltaics technology,” Physica Status Solidi C, vol. 5, no. 5, pp. 1244–1248, 2008. View at Publisher · View at Google Scholar · View at Scopus
  16. J. D. Walker, H. Khatri, V. Ranjan, J. Li, R. W. Collins, and S. Marsillac, “Electronic and structural properties of molybdenum thin films as determined by real-time spectroscopic ellipsometry,” Applied Physics Letters, vol. 94, no. 14, Article ID 141908, 2009. View at Publisher · View at Google Scholar · View at Scopus
  17. J. Lee, P. I. Rovira, I. An, and R. W. Collins, “Rotating-compensator multichannel ellipsometry: applications for real time Stokes vector spectroscopy of thin film growth,” Review of Scientific Instruments, vol. 69, no. 4, pp. 1800–1810, 1998. View at Google Scholar · View at Scopus
  18. B. Johs, J.A. Woollam, C.M. Herzinger, J.N. Hilfiker, R. Synowicki, and C. Bungay, “Overview of variable angle spectroscopic ellipsometry (VASE), Part II: advanced applications,” in Proceedings of the Society of Photo-Optical Instrumentation Engineers, vol. 72, pp. 29–58, 1999.
  19. H. Windischmann, “Intrinsic stress in sputter-deposited thin films,” Critical Reviews in Solid State and Materials Sciences, vol. 17, no. 6, pp. 547–596, 1992. View at Google Scholar · View at Scopus
  20. T. Yamaguchi and R. Miyagawa, “Effects of oxygen on the properties of sputtered molybdenum thin films,” Japanese Journal of Applied Physics, Part 1, vol. 30, no. 9, pp. 2069–2073, 1991. View at Google Scholar · View at Scopus
  21. N. Kasai and M. Kakudo, “Springer series in chemical physics: preface,” Springer Series in Chemical Physics, vol. 80, pp. 364–365, 2005. View at Google Scholar · View at Scopus
  22. H. V. Nguyen, I. An, and R. W. Collins, “Evolution of the optical functions of thin-film aluminum: a real-time spectroscopic ellipsometry study,” Physical Review B, vol. 47, no. 7, pp. 3947–3965, 1993. View at Publisher · View at Google Scholar · View at Scopus
  23. I. An, Y. M. Li, C. R. Wronski, H. V. Nguyen, and R. W. Collins, “In situ determination of dielectric functions and optical gap of ultrathin amorphous silicon by real time spectroscopic ellipsometry,” Applied Physics Letters, vol. 59, no. 20, pp. 2543–2545, 1991. View at Publisher · View at Google Scholar · View at Scopus
  24. F. Wooten, Optical Properties of Solids, chapter 3, Academic Press, San Diego, Calif, USA, 1972.
  25. S. O. Kasap, Principles of Electronic Materials and Devices, McGraw Hill, New York, NY, USA, 3rd edition, 2006.
  26. E. Eser, S. Fields, G. Hanket, R. W. Birkmire, and J. Doody, “Critical issues in vapor deposition of Cu(InGa)Se2 on polymer web: source spitting and back contact cracking,” in Proceedings of the 31st IEEE Photovoltaic Specialists Conference, pp. 515–518, January 2005. View at Scopus