Research Article

TiO2:(Fe, S) Thin Films Prepared from Complex Precursors by CVD, Physical Chemical Properties, and Photocatalysis

Table 5

Surface morphology data of the samples TiO2:Fe obtained by AFM.

SampleFilm thickness (nm)Quantity of FeDtc in the evaporator (g)Evaporation modeMaximum size, h (nm)Medium size (nm)Medium irregularity (nm)

738000.008Internal38120351.8
759180.016Internal37020851.2
775930.032Internal33822836.1
7910450.008External21510422.8
805600.016External1427213.3
815800.016External1348415.1
837600.032External18311418.2
854800.064External1206711.8
871450.300External793910.1