Impedance Spectroscopic Study of p-i-n Type a-Si Solar Cell by Doping Variation of p-Type Layer

Table 1

The deposition conditions for the p-type a-Si : H layers.

Sample	Gas ratio			Thickness (nm)	Power density (mW/cm^2)	Temp. (°C)	Pressure (mTorr)
	SiH4	H2	B2H6
1	1	5	0.05	150	50	175	200
2			0.1
3			0.3
4			0.5