Research Article

Current Mechanism in H f O 2 -Gated Metal-Oxide-Semiconductor Devices

Table 1

The , , , and values for the investigated device structure of Figure 3.

T (K)n (A/cm2) (eV)

1004.325.50 × 10−060.172
1203.987.36 × 10−060.213
1403.579.35 × 10−060.249
1603.321.40 × 10−050.283
1802.981.96 × 10−050.316
2002.643.04 × 10−050.347
2202.366.64 × 10−050.371
2402.111.28 × 10−050.395
2601.842.67 × 10−050.415
2801.523.49 × 10−050.443
3001.384.62 × 10−050.472
3201.247.12 × 10−050.516