Research Article

Effect of High-Temperature Annealing on Ion-Implanted Silicon Solar Cells

Table 1

Results of PC1D simulation using data in this study.

Wafer typeAnnealing condition (mA/cm2) (mV)Efficiency (%)
Temperatur (°C)Time (min)

P-type10006034.7638.218.4
9034.4632.118
10509033.5616.217.1

N-type10006034.5650.918.5
9034.8652.118.6
10509034.7655.918.6

N-type (with backside emitter)10006031.1652.116.7
9031.4652.616.9
10509031.665617.1