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International Journal of Photoenergy
Volume 2012 (2012), Article ID 971093, 5 pages
Research Article

Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells

Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

Received 9 May 2012; Revised 13 July 2012; Accepted 15 July 2012

Academic Editor: F. Yakuphanoglu

Copyright © 2012 Bangwu Liu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Bangwu Liu, Sihua Zhong, Jinhu Liu, Yang Xia, and Chaobo Li, “Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells,” International Journal of Photoenergy, vol. 2012, Article ID 971093, 5 pages, 2012. doi:10.1155/2012/971093