Radiation Damage in Electronic Memory Devices

Figure 4

The simulation of 30 keV alpha particles passing through 0.5 μm thick layer of SiO₂ (10 events). (a) Trajectory of alpha particles in 𝑥𝑂𝑦 plane. (b) The ratio of specific ionization (linear transfer of energy) of incident alpha particles and displaced Si and O atoms along the oxide depth.

(a)

(b)