Low Cost Amorphous Silicon Intrinsic Layer for Thin-Film Tandem Solar Cells

Table 1

A more detailed comparison between samples with two different hydrogen dilution ratios (i.e., 3 and 1).

Intrinsic layer (FR = 20.8 slm, P = 0.5 mbar, Dilu = 2.5)	Dilu = 3	Dilu = 1
Depo. rate (A/sec)	2	3.35
𝑘	0.619	0.618
Uniformity	9.95%	15.72%