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International Journal of Photoenergy
Volume 2013, Article ID 191742, 7 pages
Research Article

Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution

1Department of Environmental Engineering, National Ilan University, Ilan 260, Taiwan
2Department of Public Health, School of Medicine, College of Medicine, Taipei Medical University, Taipei 110, Taiwan
3School of Public Health, College of Public Health and Nutrition, Taipei Medical University, Taipei 110, Taiwan
4Department of Cosmetic Application & Management, St. Mary’s Junior College of Medicine, Nursing and Management, Yilan 266, Taiwan

Received 18 June 2013; Revised 21 September 2013; Accepted 3 October 2013

Academic Editor: Manickavachagam Muruganandham

Copyright © 2013 Chyow-San Chiou et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater. This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (/) and , denoted as UV/, to TMAH in an aqueous solution. The mineralization efficiency of TMAH under various conditions follows the sequence: UV/ > UV// > /// > / > // > > UV/. The results suggest that UV/ process provides the best condition for the mineralization of TMAH (40 mg/L), resulting in 87.6% mineralization, at 60 min reaction time. Furthermore, the mineralization efficiency of /// was significantly higher than that of , /, and UV/. More than 90% of the magnetic catalyst was recovered and easily redispersed in a solution for reuse.