Table of Contents Author Guidelines Submit a Manuscript
International Journal of Photoenergy
Volume 2013, Article ID 245195, 4 pages
http://dx.doi.org/10.1155/2013/245195
Research Article

Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells

1Department of Mechanical Engineering, Kun Shan University, Tainan 71003, Taiwan
2Metal Industries Research & Development Center, Kaohsiung 81160, Taiwan
3Taiwan Cement Corporation, Taipei 10448, Taiwan

Received 24 December 2012; Revised 27 March 2013; Accepted 29 March 2013

Academic Editor: Ching-Song Jwo

Copyright © 2013 Hsiao-Yeh Chu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. S. W. Lee, Y. C. Jeon, and S. K. Joo, “Pd induced lateral crystallization of amorphous Si thin films,” Applied Physics Letters, vol. 66, no. 13, pp. 1671–1673, 1995. View at Google Scholar
  2. O. Ebil, R. Aparicio, S. Hazra, R. W. Birkmire, and E. Sutter, “Deposition and structural characterization of poly-Si thin films on Al-coated glass substrates using hot-wire chemical vapor deposition,” Thin Solid Films, vol. 430, no. 1-2, pp. 120–124, 2003. View at Publisher · View at Google Scholar · View at Scopus
  3. F. M. Zhang, X. C. Liu, G. Ni, and Y. W. Du, “Controlled growth of high-quality poly-silicon thin films with huge grains on glass substrates using an excimer laser,” Journal of Crystal Growth, vol. 260, no. 1-2, pp. 102–108, 2004. View at Publisher · View at Google Scholar · View at Scopus
  4. J. Schneider, R. Heimburger, J. Klein, M. Muske, S. Gall, and W. Fuhs, “Aluminum-induced crystallization of amorphous silicon: influence of temperature profiles,” Thin Solid Films, vol. 487, no. 1-2, pp. 107–112, 2005. View at Publisher · View at Google Scholar · View at Scopus
  5. M. Shahidul Haque, H. A. Naseem, and W. D. Brown, “Interaction of aluminum with hydrogenated amorphous silicon at low temperatures,” Journal of Applied Physics, vol. 75, no. 8, pp. 3928–3935, 1994. View at Publisher · View at Google Scholar · View at Scopus
  6. M. S. Ashtikar and G. L. Sharma, “Structural investigation of gold induced crystallization in hydrogenated amorphous silicon thin films,” Japanese Journal of Applied Physics, vol. 34, no. 10, pp. 5520–5526, 1995. View at Google Scholar · View at Scopus
  7. H. Kim, G. Lee, D. Kim, and S. H. Lee, “A study of polycrystalline silicon thin films as a seed layer in liquid phase epitaxy using aluminum-induced crystallization,” Current Applied Physics, vol. 2, no. 1, pp. 129–133, 2002. View at Google Scholar · View at Scopus
  8. P. I. Widenborg and A. G. Aberle, “Surface morphology of poly-Si films made by aluminium-induced crystallisation on glass substrates,” Journal of Crystal Growth, vol. 242, no. 3-4, pp. 270–282, 2002. View at Publisher · View at Google Scholar · View at Scopus
  9. M. Hossain, H. M. Meyer, H. H. Abu-Safe, H. Naseem, and W. D. Brown, “Large-grain poly-crystalline silicon thin films prepared by aluminum-induced crystallization of sputter-deposited hydrogenated amorphous silicon,” Journal of Materials Research, vol. 21, no. 3, pp. 761–766, 2006. View at Publisher · View at Google Scholar · View at Scopus
  10. V. Subramanian, P. Dankoski, L. Degertekin, B. T. Khuri-Yakub, and K. C. Saraswat, “Controlled two-step solid-phase crystallization for high-performance polysilicon TFT's,” IEEE Electron Device Letters, vol. 18, no. 8, pp. 378–381, 1997. View at Google Scholar · View at Scopus
  11. Ö. Tüzün, A. Slaoui, I. Gordon et al., “N-type polycrystalline silicon films formed on alumina by aluminium induced crystallization and overdoping,” Thin Solid Films, vol. 516, no. 20, pp. 6892–6895, 2008. View at Publisher · View at Google Scholar · View at Scopus