The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells

Table 2

The L₉ (3³) orthogonal array with three columns and nine rows.

No.		Control factors
	A	B	C
1	1	1	1
2	1	2	2
3	1	3	3
4	2	1	2
5	2	2	3
6	2	3	1
7	3	1	3
8	3	2	1
9	3	3	2

A: working pressure (mTorr), B: dc power (W), and C: substrate temperature (°C).