The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells

Table 3

ANOVA results for the electrical resistivity of the Mo films.

Factor	Degrees of freedom	Sum of; the squares	Variance	Contribution (%)
A	2	1093.37	546.684	94.77
B	2	28.52	14.259	2.47
C	2	12.79	6.393	1.11
Residual error	2	18.94	9.470	1.65
Total	8	1153.61		100