The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells

Table 4

Summary of the X-ray diffraction measurements and the results for electrical resistivity, reflection, and adhesion tests.

No.		Factors		XRD		Resistivity (Ω-cm)	Reflection (%)	Adhesion (fail/pass)
	A	B	C	FWHM (110) (deg)	Grain size (nm)
1	1	1	1	0.50	17.69	2.53×10^−5	55.40	Fail
2	1	2	2	0.51	17.34	1.87×10^−5	55.22	Fail
3	1	3	3	0.49	18.05	1.65×10^−5	58.87	Fail
4	2	1	2	1.01	8.76	2.558×10^−4	38.63	Pass
5	2	2	3	0.58	15.25	1.047×10^−4	40.11	Pass
6	2	3	1	0.83	10.66	1.418×10^−4	42.90	Pass
7	3	1	3	1.03	8.58	4.454×10^−4	32.47	Pass
8	3	2	1	1.25	7.07	5.873×10^−4	34.55	Pass
9	3	3	2	0.96	9.21	2.769×10^−4	42.97	Pass