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International Journal of Photoenergy
Volume 2013 (2013), Article ID 431614, 7 pages
http://dx.doi.org/10.1155/2013/431614
Research Article

Surface Passivation and Antireflection Behavior of ALD on n-Type Silicon for Solar Cells

1Department of Materials Science and Engineering, National Dong Hwa University, Hualien 97401, Taiwan
2Department of Electro-Optical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan
3Institute of Photonic System, National Chiao Tung University, Tainan 71150, Taiwan

Received 16 September 2013; Accepted 30 October 2013

Academic Editor: Jimmy Yu

Copyright © 2013 Ing-Song Yu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Ing-Song Yu, Yu-Wun Wang, Hsyi-En Cheng, Zu-Po Yang, and Chun-Tin Lin, “Surface Passivation and Antireflection Behavior of ALD on n-Type Silicon for Solar Cells,” International Journal of Photoenergy, vol. 2013, Article ID 431614, 7 pages, 2013. doi:10.1155/2013/431614