Isolation of III-V/Ge Multijunction Solar Cells by Wet Etching
Figure 5
Normalized deflection measured by profilometry: (a) Ge substrate, (b) III-V/Ge wafer with SixNy coating at the back side, (c) III-V/Ge wafer for which the SixNy coating at the back side was removed and (d) III-V/Ge wafer with SixNy coating at the back side and tensile SixNy film on the front side.
