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International Journal of Photoenergy
Volume 2013, Article ID 612163, 8 pages
http://dx.doi.org/10.1155/2013/612163
Research Article

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

1Institute of Mechatronic Engineering, National Taipei University of Technology, Taipei 10608, Taiwan
2College of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan
3Graduate College of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan

Received 7 December 2012; Revised 28 January 2013; Accepted 1 February 2013

Academic Editor: Ho Chang

Copyright © 2013 Chii-Ruey Lin et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

This study intends to deposit high transmittance diamond-like carbon (DLC) thin films on D263T glass substrate at room temperature via a diamond powder target using the radio frequency (RF) magnetron sputtering technique. Moreover, various process parameters were used to tune the properties of the thin films by using the Taguchi method. Experimental results show that the content of sp3 bonded carbon decreases in accordance with the effect of the substrate temperature. In addition, the hardness of all as-deposited single-layer DLC films ranges from 13.2 to 22.5 GPa, and the RMS surface roughness was improved significantly with the decrease in sputtering pressure. The water repellent of the deposited DLC films improved significantly with the increase of the sp3 content, and its contact angle was larger than that of the noncoated one by 1.45 times. Furthermore, the refraction index (n) of all as-deposited DLC films ranges from 1.95 to 2.1 at λ = 600 nm. These results demonstrate that the thickness increased as the reflectance increased. DLC film under an RF power of 150 W possesses high transmissive ability (>81%) and low average reflectance ability (<9.5%) in the visible wavelengths (at λ = 400–700 nm).