Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

<table>Response graph of four factors versus RMS surface roughness. The ranking order of the magnitude of RMS surface roughness at various levels indicates that the effects of various factors on the RMS surface roughness are ranked in the following order: sputtering pressure, deposition time, working distance, and RF power.</table>

International Journal of Photoenergy

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Figure 5

Figure 5: Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer 