Optical and Electrical Effects of p-type μc-SiO_x:H in Thin-Film Silicon Solar Cells on Various Front Textures

Table 1

Overview of deposition parameters for the p-type 𝜇c-SiO_𝑥:H layer deposition by PECVD.

Power density/W/cm²	Frequency/MHz	Pressure/mbar	Temperature/°C	H2 dil.; (SiH4:H2)	𝑟CO2	𝑟TMB
0.5	13.56	13.3	220	4.2 : 2000	1.2–6.0	0–0.036