Optical and Electrical Effects of p-type μc-SiO_x:H in Thin-Film Silicon Solar Cells on Various Front Textures

Table 2

Overview of front TCOs and applied procedures; autocorrelation length (ACL) and root mean square (RMS) roughness are presented as a measure of surface texture.

Type	Front TCO	1st treatment	2nd treatment	ACL/nm	RMS/nm
A	ZnO:Al	40 s HCl	—	715	110
B	ZnO:Al	20 s HF	5 s HCl	490	85
C	ZnO:Al	30 s HCl	10 s HF	630	125
D	SnO2:F (AsahiU)	50 nm ZnO:Al protection layer		195	40