Vapour-Phase and Solid-Phase Epitaxy of Silicon on Solid-Phase Crystallised Seed Layers for Solar Cells Application
Figure 3
SEM image of Secco etched VPE and SPE thickened poly-Si films. (a) VPE sample after 15 s Secco etching and (b) SPE sample after Secco etching for 60 s (planar defects are noted by arrows in (b)).
