International Journal of Photoenergy / 2014 / Article / Tab 1

Research Article

Expanding Thermal Plasma Chemical Vapour Deposition of ZnO:Al Layers for CIGS Solar Cells

Table 1

The experimental parameters used to deposit ZnO:Al layers at low thermal budget (LTB) and high thermal budget (HTB) conditions.

Condition (g/h) (g/h) (slm) (slm) (mbar)Temp.
set-point (°C)
He flowTime
(min)
Final temp. (°C)

LTB4.50.61.51002100On3.3–13.3140–290
HTB4.50.611002100Off6.0–30.4158–392

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