Research Article
Void Shapes Controlled by Using Interruption-Free Epitaxial Lateral Overgrowth of GaN Films on Patterned SiO2 AlN/Sapphire Template
Figure 1
(a) Cross-sectional structure of patterned SiO2 AlN/sapphire template. (b) Tilted SEM image of patterned SiO2 AlN/sapphire template.