Research Article

Void Shapes Controlled by Using Interruption-Free Epitaxial Lateral Overgrowth of GaN Films on Patterned SiO2 AlN/Sapphire Template

Figure 1

(a) Cross-sectional structure of patterned SiO2 AlN/sapphire template. (b) Tilted SEM image of patterned SiO2 AlN/sapphire template.
621789.fig.001a
(a)
621789.fig.001b
(b)