SiO₂ Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells

Table 1

Summary of the average electrical parameters of the different ARC stacks compared with :H SARC solar cells (AM1.5G, 100 mW/cm², 25°C).

Samples	Efficiency; (%)	FF; (%)	(mA/cm^2)	(mV)
:H (80 nm)	17.48	76.82	36.74	621.6
SiO2 (105 nm)/:H (80 nm)	17.80	77.58	37.77	621.3
SiO2 (122 nm)/:H (80 nm)	17.55	76.64	37.29	620.8