Research Article

Excellent Silicon Surface Passivation Achieved by Industrial Inductively Coupled Plasma Deposited Hydrogenated Intrinsic Amorphous Silicon Suboxide

Figure 3

Lifetime as a function of CO2 partial pressure while keeping other deposition conditions constant. The inset shows sample structure used in measuring lifetime. The line is a guide to the eye. A lifetime peak is observed at CO2 partial pressure of 10%.
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